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ADT Model 7100 Semi-Automatic Dicing System Operations Manual

List of Figures

P/N 97100-9002-000-14 Ver 06/05

xxi

Figure 5-14: Angle Tab Popup Menu ________________________________ 5.4-6

Figure 5-15: PP Insert Dialog Box __________________________________ 5.4-6

Figure 5-16: Angle Tab Added _____________________________________ 5.4-6

Figure 5-17: PP Move Dialog Box___________________________________ 5.4-7

Figure 5-18: Moving an Angle Tab __________________________________ 5.4-7

Figure 5-19: PP Change Dialog Box_________________________________ 5.4-8

Figure 5-20: Parameter Category List _______________________________ 5.4-9

Figure 5-21: Parameter List _______________________________________ 5.4-9

Figure 5-22: Recipe Export Dialog Box ______________________________ 5.5-1

Figure 5-23: Recipe Import Dialog Box ______________________________ 5.5-2

Figure 5-24: APC Standard Cut Map ________________________________ 5.6-2

Figure 5-25: APC Loop Cut Map____________________________________ 5.6-3

Figure 5-26: GPC Standard Cut Map ________________________________ 5.6-4

Figure 5-27: GPC Multi-Die Size Cut Map ____________________________ 5.6-5

Figure 6-1: Workpiece Before and After Alignment ___________________ 6.1-1

Figure 6-2: Aligning the Reticle ___________________________________ 6.1-3

Figure 6-3: Sample Cut Position __________________________________ 6.1-4

Figure 6-4: Index _______________________________________________ 6.1-5

Figure 6-5: Teach Parameter Button Enabled________________________ 6.1-6

Figure 6-6: Teach Alignment Process Message Box __________________ 6.1-6

Figure 6-7: Teach Index Process Dialog Box ________________________ 6.1-7

Figure 6-8: Update Parameters Dialog Box__________________________ 6.1-8

Figure 6-9: Copy From Angle - Enhancement Parameters ____________ 6.1-11

Figure 6-10: Selecting an Align Type_______________________________ 6.1-12

Figure 6-11: Teach Alignment Opening Wizard ______________________ 6.1-13

Figure 6-12: Spiral Search _______________________________________ 6.1-15

Figure 6-13: Directional Search ___________________________________ 6.1-15

Figure 6-14: Main Model Search___________________________________ 6.1-16

Figure 6-15: Alignment Algorithm _________________________________ 6.1-17

Figure 6-16: Conceptual Cutting by Angle diagram ___________________ 6.1-20

Figure 6-17: Multi-Panel Teach Screen _____________________________ 6.1-21

Figure 6-18: Multi angles View ____________________________________ 6.1-21

Figure 6-19: Model Options ______________________________________ 6.1-23

Figure 6-20: Model Processing Filter Parameters ____________________ 6.1-25

Figure 6-21: Rotational Shrinkage Parameters_______________________ 6.1-26

Figure 6-22: Average Index Parameters ____________________________ 6.1-27

Figure 6-23: Kerf Check Glossary __________________________________ 6.3-1

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Axis 7100 Guía de instalación Pagina 21